Wafer‐Scale Fabrication of Broadband Sb 2 Se 3 Photodetectors and their Multifunctional Optoelectronic Applications

Low‐dimensional van der Waals materials (vdWMs) have attracted worldwide interest on account of numerous advantages including self‐passivated surface, high carrier mobility, excellent flexibility, etc . Among multiple vdWMs, Sb 2 Se 3 stands out due to its high light absorption coefficient, environmentally friendly components, excellent stability, and abundant reserve. However, limited effective wavelength range and unscalable preparation have been obstinate issues standing in the way of further development. Herein, pulsed‐laser deposition (PLD) has been developed for synthesizing Sb 2 Se 3 nanofilms, and wafer‐scale deposition has been realized. The PLD‐derived Sb 2 Se 3 photodetector demonstrates broadband photoresponse across UV to NIR. First‐principles calculations have determined that this is because the formation of Se vacancies can result in a reduction of the bandgap. Upon 635 nm illumination, an optimal responsivity of 2.68 A W −1 has been achieved, corresponding to an external quantum efficiency of 524% and a specific detectivity of 1.34 × 10 12 Jones. Furthermore, the device manifests a short response/recovery time of ≈2/1 ms. Proof‐of‐concept broadband imaging as well as fitness monitoring (respiratory rate & heart rate) have been realized. Profited from the scalable preparation, an array of Sb 2 Se 3 photodetectors have been produced, exhibiting qualified device‐to‐device variation. On the whole, this study has depicted an attractive landscape for next‐generation integrated optoelectronics.