研究论文
Machine learning–driven in situ process monitoring with vibration frequency spectra for chemical mechanical planarization
Jia Liu, Jingyi Zheng, Prahalada Rao, Zhenyu Kong
Auburn University University of Nebraska–Lincoln Virginia Tech
来源The International Journal of Advanced Manufacturing Technology
年份2020
阅读操作
确认中在文库中上传 PDF 后可生成中文音频讲解。
摘要与影响
摘要 · 节选
暂未获取摘要。可打开原文或 PDF，后续可基于全文生成更完整的速读。
逐年被引趋势
320
323
24
25
26
关键指标
11
被引次数 · OpenAlex
0.32
领域内被引倍数
同类平均 = 1
同类平均 = 1
前 48%
引用位次
同领域 · 同年份 · 同类型
同领域 · 同年份 · 同类型
51
参考文献
Google Scholar 与 OpenAlex 的被引统计范围不同，数值存在差异属正常。
AI 辅助阅读
依据：文献信息
论文问答
当前基于文献信息回答
可就本文提问；依据不足时会说明。
学术脉络
学科主题
工程Advanced machining processes and optimization
Advanced Surface Polishing Techniques · Advanced Measurement and Metrology Techniques
参考文献 51
A review of neural networks for statistical process control
被引 149Farbod Zorriassatine, J. D. T. Tannock · Journal of Intelligent Manufacturing · 1998
A Review of Statistical Methods for Quality Improvement and Control in Nanotechnology
被引 48Jye‐Chyi Lu, Shuen‐Lin Jeng, Kaibo Wang · Journal of Quality Technology · 2009
Classification and Regression by randomForest
被引 18,421Andy Liaw, Matthew C. Wiener · 2007
此处列出前 3 条
引用本文 11
Time-series pattern recognition in Smart Manufacturing Systems: A literature review and ontology
被引 72Mojtaba A. Farahani, Matt McCormick, Robert Gianinny · Journal of Manufacturing Systems · 2023
Typical applications and perspectives of machine learning for advanced precision machining: A comprehensive review
被引 20Yiji Liang, Canwen Dai, Jingwei Wang · Expert Systems with Applications · 2025
In-process monitoring of the ultraprecision machining process with convolution neural networks
被引 13K Manjunath, Suman Tewary, Neha Khatri · International Journal of Computer Integrated Manufacturing · 2023
按被引量排序，此处列出前 3 条