研究论文
Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source
Daisuke Nakamura, K. Tamaru, Tsuyoshi Akiyama, Akihiko Takahashi, T. Okada
Kyushu University
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逐年被引趋势
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学术脉络
学科主题
工程Laser-induced spectroscopy and plasma
Atomic and Molecular Physics · Plasma Diagnostics and Applications
参考文献 9
Spectroscopic study of debris mitigation with minimum-mass Sn laser plasma for extreme ultraviolet lithography
被引 45Shinichi Namba, Shinsuke Fujioka, H. Nishimura · Applied Physics Letters · 2006
Development of Visualization System of Neutral Particles Generated from Laser-Produced Plasma for an EUV Light Source
被引 1Hiroki Tanaka, Atsushi Matsumoto, Akihiko Takahashi · Journal of Physics Conference Series · 2007
Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas
被引 156Hiroki Tanaka, Atsushi Matsumoto, Kouzi Akinaga · Applied Physics Letters · 2005
此处列出前 3 条
引用本文 3
Laser-plasma EUV source dedicated for surface processing of polymers
被引 61Andrzej Bartnik, Henryk Fiedorowicz, R. Jarocki · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2011
Lasers in Materials Processing and Synthesis
被引 3Sisir K. Sarkar · Indian Institute of Metals series · 2022
Transformation and Functionalization of Organic Materials
被引 1Dieter Bäuerle · 2011
按被引量排序，此处列出前 3 条