研究论文
Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques
Ron A. Lawes
Imperial College London
来源Microsystem Technologies
年份2006
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学术脉络
学科主题
工程Advanced MEMS and NEMS Technologies
Manufacturing Process and Optimization · Microfluidic and Capillary Electrophoresis Applications
参考文献 12
Challenges, developments and applications of silicon deep reactive ion etching
被引 233Franz Laermer, Andrea Urban · Microelectronic Engineering · 2003
Micromachining applications of a high resolution ultrathick photoresist
被引 382Kangsik Lee, N. LaBianca, Stephen A. Rishton · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995
Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination
被引 127Yun-Ju Chuang, Fan‐Gang Tseng, Wen Kuang Lin · Microsystem Technologies · 2002
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引用本文 52
Flexible vibrational energy harvesting devices using strain-engineered perovskite piezoelectric thin films
被引 157Sung Sik Won, Hosung Seo, Masami Kawahara · Nano Energy · 2018
3D printing of micro-nano devices and their applications
被引 101Naibo Zhang, Zilai Wang, Zixin Zhao · Microsystems & Nanoengineering · 2025
Experimental Analysis of Laser Micromachining of Microchannels in Common Microfluidic Substrates
被引 75Prashanth Reddy Konari, Yung‐Dai Clayton, Melville Bailey Vaughan · Micromachines · 2021
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