Impact of ultra-thin titanium film thickness on titanium silicides: specific contact resistivity and thermal stability

Haisu Gao, Jing Xu, Xu Chen, Chang Liu, Jinbiao Liu, Xianglie Sun, Jianfeng Gao, Shujuan Mao 等 11 位

Institute of Microelectronics　State Key Laboratory on Integrated Optoelectronics　University of Chinese Academy of Sciences　Beijing Academy of Science and Technology