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Electrical conductivity enhancement of epitaxially grown TiN thin films
Yeong Gwang Khim, Beomjin Park, Jin Eun Heo, Young Hun Khim, Young Rok Khim, Minseon Gu, Tae Gyu Rhee, Seo Hyoung Chang 等 10 位
University of Seoul Chung-Ang University
来源Journal of the Korean Physical Society
年份2023
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学术脉络
学科主题
工程Metal and Thin Film Mechanics
Semiconductor materials and interfaces · GaN-based semiconductor devices and materials
参考文献 39
Atomic layer deposition of titanium nitride from TDMAT precursor
被引 174Jan Musschoot, Qi Xie, Davy Deduytsche · Microelectronic Engineering · 2008
Thickness dependence of resistivity for Cu films deposited by ion beam deposition
被引 107Jae‐Won Lim, K. Mimura, M. Isshiki · Applied Surface Science · 2003
Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films
被引 118Dooho Choi, Bincheng Wang, Suk Chung · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011
此处列出前 3 条
引用本文 18
Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis
被引 26Beyza Nur Günaydın, Ali Osman Çetinkaya, Milad Torabfam · Advances in Colloid and Interface Science · 2024
Selective dry etching of TiAlC over TiN using nonhalogen N2/H2 plasma
被引 7Thi‐Thuy‐Nga Nguyen, Kazunori K. Shinoda, Shih‐Nan Hsiao · Applied Surface Science · 2025
Investigation of the characteristics of TiN-coating film deposited by arc ion plating method and the feasibility of measuring residual stress according to heat treatment
被引 7Chang-Suk Han, Sung‐Soon Park, Min-Gyu Chun · Journal of the Korean Physical Society · 2024
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