研究论文
Bonding structure and dry etching characteristics in amorphous B–C–N films for hardmask applications
Hongik Kim, Ung-gi Kim, Deokgi Hong, Sung‐Tae Kim, Seungwu Han, Young‐Chang Joo, So-Yeon Lee
Seoul National University Kumoh National Institute of Technology
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工程Advancements in Photolithography Techniques
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参考文献 65
First-principle study of C 1s core-level shifts in amorphous carbon
被引 18Rainer Haerle, Alfredo Pasquarello, A. Baldereschi · Computational Materials Science · 2001
Characterisation of Photocathodes Based on Pb Thin Film Deposited by UV Pulsed Laser Ablation
被引 9Francisco Gontad, A. Lorusso, G. Gatti · Journal of Material Science and Technology · 2013
sp 2 / s p 3 hybridization ratio in amorphous carbon from C 1 s core-level shifts: X-ray photoelectron spectroscopy and first-principles calculation
被引 385Rainer Haerle, Elisa Riedo, Alfredo Pasquarello · Physical review. B, Condensed matter · 2001
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引用本文 4
Insights into tribological performances of magnetron-sputtered Si-B-C-N films in air and seawater conditions
被引 5Jing Luan, Lujing Wang, Junhua Xu · Ceramics International · 2025
Plasma-deposited tungsten-doped amorphous carbon films for advanced dry etching hardmasks
被引 2Gaosheng Zhang, Yulong Wu, Haydn Zhou · Thin Solid Films · 2025
Realizing efficient combustion of boron powders via the tailored boron-TAHT coupling interfaces and microscale explosion effect
被引 1Huijie Zhang, Miaomiao Wu, Chong Wan · Fuel · 2026
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