研究论文
Highly dispersed Gd-CeO2 nanocrystals supported on mesoporous silica composite particles towards photochemical (photo-assisted chemical) mechanical polishing
Yang Chen, Luning Zhong, Ailian Chen, Meng Fu, Xiaowang Lu
Changzhou University Yancheng Institute of Technology
来源Ceramics International
年份2023
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学术脉络
学科主题
工程Advanced Surface Polishing Techniques
Diamond and Carbon-based Materials Research · Electronic and Structural Properties of Oxides
参考文献 77
Chemical processes in glass polishing
被引 997Lee M. Cook · Journal of Non-Crystalline Solids · 1990
Hierarchically Structured Ceria-Silica: Synthesis and Thermal Properties
被引 25Peter W. Dunne, Anna Margareta Carnerup, Agnieszka Węgrzyn · The Journal of Physical Chemistry C · 2012
Laser-assisted three-dimensional atom probe analysis of dopant distribution in Gd-doped CeO2
被引 46F. Li, Tadakatsu Ohkubo, Y.M. Chen · Scripta Materialia · 2010
此处列出前 3 条
引用本文 37
A review on the development of ceria for chemical mechanical polishing
被引 77Jiahui Ma, Ning Xu, Jie Cheng · Powder Technology · 2024
Trivalent lanthanum and ytterbium doped meso-silica/ceria abrasive systems toward chemical mechanical polishing (CMP) and ultraviolet irradiation-assisted photochemical mechanical polishing (PCMP)
被引 42Zihan Kou, Chao Wang, Wenjin Zhou · Applied Surface Science · 2024
Atomic surface induced by novel green chemical mechanical polishing for aspheric thin-walled crucibles with large diameters
被引 36Xiangxiang Cui, Zhenyu Zhang, Chunjing Shi · Journal of Manufacturing Processes · 2024
按被引量排序,此处列出前 3 条