Incorporation of SiC on the mechanical properties, tribological performance, and oxidation resistance of HfC-SiC/a-C:H coatings prepared by hybrid HiPIMS and pulsed-DC magnetron co-sputtering

Huan Luo, Hui Sun, Xiaolei Ye, Peipei Wang, Xing Zhao, Pascal Briois, Alain Billard

Xi'an University of Science and Technology　Shandong University　Kunming University of Science and Technology　Centre National de la Recherche Scientifique