研究论文
Design of a novel 3D ultrasonic vibration platform with tunable characteristics
Zhilai Lu, Yanling Tian, Chunfeng Liu, Chongkai Zhou, Zhiyong Guo, Fujun Wang, Dawei Zhang, Bijan Shirinzadeh
Tianjin University University of Warwick Civil Aviation University of China Monash University
来源International Journal of Mechanical Sciences
年份2020
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工程Nanofabrication and Lithography Techniques
Advanced Surface Polishing Techniques · Piezoelectric Actuators and Control
参考文献 56
Silicon Nanowire Transistors with a Channel Width of 4 nm Fabricated by Atomic Force Microscope Nanolithography
被引 124J. Martinez, Ramsés V. Martínez, Ricardo Garcı́a · Nano Letters · 2008
Understanding Sub-20 nm Breakdown Behavior of Liquid Dielectrics
被引 26Kumar Virwani, Ajay P. Malshe, K. P. Rajurkar · Physical Review Letters · 2007
Parallel dip-pen nanolithography with arrays of individually addressable cantilevers
被引 120David Bullen, Sung Wook Chung, Xue‐Feng Wang · Applied Physics Letters · 2004
此处列出前 3 条
引用本文 36
Vibration coupling effects and machining behavior of ultrasonic vibration plate device for creep-feed grinding of Inconel 718 nickel-based superalloy
被引 187Yang CAO, Yejun Zhu, Wenfeng Ding · Chinese Journal of Aeronautics · 2021
Design of a rhombus-type stick-slip actuator with two driving modes for micropositioning
被引 55Beichao Shi, Fujun Wang, Zhichen Huo · Mechanical Systems and Signal Processing · 2021
A miniature piezoelectric actuator with fast movement and nanometer resolution
被引 40Wentao Wei, Zhaochun Ding, Jiang Wu · International Journal of Mechanical Sciences · 2024
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