研究论文
Study on the processing outcomes of the atomic force microscopy tip-based nanoscratching on GaAs
Jiqiang Wang, Yongda Yan, Bosen Jia, Yanquan Geng
Harbin Institute of Technology
来源Journal of Manufacturing Processes
年份2021
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学科主题
工程Advanced Surface Polishing Techniques
Force Microscopy Techniques and Applications · Nanofabrication and Lithography Techniques
参考文献 33
Elastic Recovery at Static Loading and Impact Indentations in MgF 2
被引 9H. P. Kirchner, J. A. TIRACORDA, Terry J. Larchuk · Journal of the American Ceramic Society · 1983
Modelling and experimental study of machined depth in AFM-based milling of nanochannels
被引 60Yanquan Geng, Yongda Yan, Yangming Xing · International Journal of Machine Tools and Manufacture · 2013
A study on mechanism of nano-cutting single crystal silicon
被引 167Fengzhou Fang, Hu Wu, Wei Zhou · Journal of Materials Processing Technology · 2007
此处列出前 3 条
引用本文 31
Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals
被引 316Chen Li, Yinchuan Piao, Binbin Meng · International Journal of Machine Tools and Manufacture · 2021
Nanometric cutting: Mechanisms, practices and future perspectives
被引 124Fengzhou Fang, Min Lai, Jinshi Wang · International Journal of Machine Tools and Manufacture · 2022
Scanning Probe Lithography: State-of-the-Art and Future Perspectives
被引 67Pengfei Fan, Jian Yu Gao, Hui Mao · Micromachines · 2022
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