研究论文

Formation mechanism of concave and convex surface shapes in double-sided lapping

Bo Pan, Renke Kang, Xu Zhu, Dongxing Du, Wen Lai Huang, Jiang Guo

Dalian University of Technology　China Academy of Engineering Physics

来源Journal of Materials Processing Technology

年份2022

DOI10.1016/j.jmatprotec.2022.117749

原文https://doi.org/10.1016/j.jmatprotec.2022.117749

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823

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学术脉络

学科主题

工程

Advanced Surface Polishing Techniques

Advanced machining processes and optimization · Surface Treatment and Residual Stress

参考文献 33

ANALYSIS OF KINEMATIC GEOMETRY ON FACE GRINDING PROCESS ON LAPPING MACHINES

Hongji Wu · Journal of Mechanical Engineering · 2002

被引 9

Stress distribution in chemical mechanical polishing

C Srinivasa-Murthy, D Wang, Stephen P. Beaudoin · Thin Solid Films · 1997

被引 108

A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP)

Toshi Kasai · Tribology International · 2007

被引 51

此处列出前 3 条

引用本文 21

Kinematics and trajectory analysis of swinging fixed abrasive plane lapping: Effect of swinging mode on the lapping uniformity

Ning Liu, Pengfei Wu, Fengli Niu · Precision Engineering · 2023

被引 15

A novel lapping method for ultraprecision cylindrical rollers based on precision evolution

Chengzu Ren, Weifeng Liu, Guang Chen · Journal of Materials Processing Technology · 2023