Fenton reaction-assisted chemical mechanical polishing of SiC wafer using gel disc with Al₂O₃‑SiO₂ core‑shell abrasives

Lanxing Xu, Mingfeng Ke, Liang Zhao, Kaiping Feng, Yi-Xiang Wang, Tianchen Zhao, Binghai Lyu

Zhejiang University of Technology　Quzhou University　Southwest Jiaotong University