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Atomic Layer Deposition of Two-Dimensional Layered Materials: Processes, Growth Mechanisms, and Characteristics

Jiyu Cai, Xiaoxiao Han, Xin Wang, Xiangbo Meng

University of Arkansas at Fayetteville

来源Matter

年份2020

DOI10.1016/j.matt.2019.12.026

原文https://doi.org/10.1016/j.matt.2019.12.026

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学术脉络

学科主题

材料 / 化学

2D Materials and Applications

Graphene research and applications · Electronic and Structural Properties of Oxides

参考文献 230

First-principles study of the electronic structure of γ-InSe and β-InSe

P. Gomes da Costa, R. G. Dandrea, R. F. Wallis · Physical review. B, Condensed matter · 1993

被引 111

Comparison of B2O3 and BN deposited by atomic layer deposition for forming ultrashallow dopant regions by solid state diffusion

Steven Consiglio, Robert D. Clark, David O’Meara · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015

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Atomic layer deposition of molybdenum oxide from (N<i>t</i>Bu)2(NMe2)2Mo and O2 plasma

Martijn F. J. Vos, Bart Macco, Nick F. W. Thissen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015

被引 136

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施引文献 165

Transition metal dichalcogenide (TMDs) electrodes for supercapacitors: a comprehensive review

Shweta Tanwar, Anil Arya, Anurag Gaur · Journal of Physics Condensed Matter · 2021

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Growth of 2D Materials at the Wafer Scale

Xiangming Xu, Tianchao Guo, Hyunho Kim · Advanced Materials · 2021

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Thin film photocatalysis for environmental remediation: A status review

Rupesh S. Pedanekar, Shahin Shaikh, K.Y. Rajpure · Current Applied Physics · 2020

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