p-CuGaO2/β-Ga2O3 interfaces: A high-throughput approach for interface prediction and generation for power device applications
Chowdam Venkata Prasad, Jang Hyeok Park, Qui Thanh Hoai Ta, Kyong Jae Kim, Ho Jung Jeon, Muzaffar Ali Mir, Mohsin Raza, Nguyen Ngoc Tri 等 11 位
Sejong University Institute of Advanced Technology Vietnam Academy of Science and Technology Quy Nhon University
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This study integrates a p-type copper gallium oxide (p-CuGaO 2 ) interlayer to enhance the performance of β-Ga 2 O 3 -based power devices, addressing challenges in achieving reliable p-type doping. The p-CuGaO 2 interlayer is expected to improve breakdown voltage (BV) and reduce leakage current, increasing device efficiency and reliability under high-temperature conditions. The heterojunction (HJ) system of β-Ga 2 O 3 and p-CuGaO 2 is investigated using density functional theory (DFT) via the Vienna Ab initio Simulation Package (VASP) and experimental methods, focusing on the β-Ga 2 O 3 (001)/p-CuGaO 2 (006) interface. Binding energy, electron localization, charge density difference, and electrostatic potential drop are analyzed, identifying Configuration-1 as the optimal configuration due to its high binding energy and favorable structural properties. Annealing temperature impacts the microstructure, stoichiometry, optical, electrical, and transport properties of p-CuGaO 2 /β-Ga 2 O 3 HJs. Electrical measurements reveal reduced turn-on voltage (V on ), on-resistance (R on ), and leakage currents, with the highest BV of 1.62 kV achieved at 800 °C compared to Pt/β-Ga 2 O 3 Schottky barrier diode (SBD). The interface state density (N SS ) is evaluated using the high-low frequency approach. Silvaco TCAD simulations explore breakdown mechanisms, demonstrating the potential of p-CuGaO 2 for β-Ga 2 O 3 HJ power devices. These findings support the development and manufacture of robust β-Ga 2 O 3 HJ power devices. We developed β-Ga 2 O 3 /p-CuGaO 2 HJ models using VASP and DFT to explore electronic properties. The p-CuGaO 2 film transitions from an amorphous to a polycrystalline phase at 800°C-annealing temperature. The HJ features a staggered-gap (type-II) band alignment, achieving a breakdown voltage of 1.62 kV, indicating strong potential for high-temperature applications. Silvaco TCAD simulations highlight the potential of these HJs for high-temperature power devices, particularly in challenging environments. • The p-CuGaO 2 (006)/β-Ga 2 O 3 (001) interface models with four heterostructures were investigated using the first principles based on DFT studies. • The p-CuGaO 2 /β-Ga 2 O 3 HJ annealed at 800 °C exhibits superior electrical characteristics including as compared to the as-deposited, 400 °C-annealed, and 600 °C-annealed samples. • The p-CuGaO 2 /β-Ga 2 O 3 HJs demonstrated their potential for high-temperature operation by achieving the highest BV of 1.62 kV at 800 °C. • Silvaco TCAD simulations explore breakdown mechanisms, demonstrating the potential of p-CuGaO 2 /β-Ga 2 O 3 HJ power devices. • The annealing process at 800 °C resulted in p-CuGaO 2 /β-Ga 2 O 3 HJs with excellent electrical properties and high quality, demonstrating their considerable potential for high-temperature applications.
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材料 / 化学Ga2O3 and related materials
Semiconductor materials and devices · Silicon Carbide Semiconductor Technologies
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