研究论文

Ultra-smooth Cu surface fabricated by hydrodynamic suspension polishing technique

Zhongyu Piao, Donghui Wen, Linzhi Yin, Zhao Meng-meng

Zhejiang University of Technology　Zhejiang University

来源Precision Engineering

年份2019

DOI10.1016/j.precisioneng.2019.04.005

原文https://doi.org/10.1016/j.precisioneng.2019.04.005

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逐年被引趋势

420

421

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0.83

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学术脉络

学科主题

工程

Advanced Surface Polishing Techniques

Surface Roughness and Optical Measurements · Advanced machining processes and optimization

参考文献 19

An experimental investigation of double-side processing of cylindrical rollers using chemical mechanical polishing technique

Liang Jiang, Weifeng Yao, Yongyong He · The International Journal of Advanced Manufacturing Technology · 2015

被引 32

AFM and XPS studies on material removal mechanism of sapphire wafer during chemical mechanical polishing (CMP)

Yan Zhou, Guoshun Pan, Xiao‐Lei Shi · Journal of Materials Science Materials in Electronics · 2015

被引 45

Ultrafine polishing of optical polymer with zirconia-coated carbonyl-iron-particle-based magnetic compound fluid slurry

Huiru Guo, Yongbo Wu · The International Journal of Advanced Manufacturing Technology · 2015

被引 25

此处列出前 3 条

引用本文 16

Advances in ultra-precision machining of bearing rolling elements

Chunlei He, Jing Zhang, Kun Geng · The International Journal of Advanced Manufacturing Technology · 2022

被引 50

Effect of elastohydrodynamic characteristics on surface roughness in cylindrical shear thickening polishing process

Weifeng Yao, Binghai Lyu, Tianqi Zhang · Wear · 2023

被引 36

Review on Surface Polishing Methods of Optical Parts

Mingli Xie, Yipeng Pan, Zijun An · Advances in Materials Science and Engineering · 2022

被引 33

按被引量排序，此处列出前 3 条