A study on fabrication technique of ZrB2 target

ZrB2 thin film is used as neutron burnable absorbers of nuclear reactor. This paper prepared ZrB2 target by cold isostatic press followed high temperature sintering in order to meet the requirement of preparing thin film by magnetron sputtering. The phase constituent and composition of ZrB2 target was analyzed by X-ray diffraction (XRD) and X-ray energy dispersion spectroscope(EDS). The microstructure of samples was observed by scanning electron microscope(SEM). The density was measured based on Archimedes drainage method; UO2 core was coated by ZrB2 films by magnetron sputtering using as-prepared ZrB2 target. The results indicate that 2000°C could sinter ZrB2 powder. The relative density of sintering product was 71%. The as-prepared ZrB2 might make films on the sample of UO2 surface by magnetron sputtering.