研究论文
Influence of polycrystalline silicon as electrical shield on reliability and stability of piezoresistive sensors
P.L.P. Hoa, G. Suchaneck, Gerald Gerlach
Technische Universität Dresden
来源Sensors and Actuators A Physical
年份2005
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逐年被引趋势
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1.39
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学术脉络
学科主题
计算机 / AISensor Technology and Measurement Systems
Advanced Sensor Technologies Research · Advanced MEMS and NEMS Technologies
参考文献 13
Polysilicon as a material for microsensor applications
被引 123Ε. Obermeier, P. Kopystynski · Sensors and Actuators A Physical · 1992
Applications of Polysilicon Films in Microsensors and Microactuators
被引 13Roger T. Howe · MRS Proceedings · 1987
Uncertainty in measurement of semiconductor piezoresistive sensors
被引 5P.L.P. Hoa, Gerald Gerlach, G. Suchaneck · Microsystem Technologies · 2003
此处列出前 3 条
施引文献 17
Review: Semiconductor Piezoresistance for Microsystems
被引 939A.A. Barlian, Woo‐Tae Park, Joseph R. Mallon · Proceedings of the IEEE · 2009
Humidity detection by nanostructured ZnO: A wireless quartz crystal microbalance investigation
被引 75Xiaofeng Zhou, Jian Zhang, Tao Jiang · Sensors and Actuators A Physical · 2006
Humidity sensor based on quartz tuning fork coated with sol–gel-derived nanocrystalline zinc oxide thin film
被引 74Xiaofeng Zhou, Tao Jiang, Jian Zhang · Sensors and Actuators B Chemical · 2006
按被引量排序，此处列出前 3 条