研究论文
Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel
Usung Park, Kwanghyun Yoo, Joonwon Kim
Pohang University of Science and Technology The University of Tokyo
来源Sensors and Actuators A Physical
年份2010
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学术脉络
学科主题
工程Advanced MEMS and NEMS Technologies
Mechanical and Optical Resonators · Photonic and Optical Devices
参考文献 33
Mercury droplet microswitch for re-configurable circuit interconnect
被引 10Wanzeng Shen, R. Timothy Edwards, Chang‐Jin Kim · 2004
A Piezoresistive Silicon Accelerometer With Monolithically Integrated CMOS-circuitry
被引 47Helmut Seidel, U. Fritsch, R. Gottinger · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005
Fabrication technologies for microsystems utilizing photoetchable glass
被引 156T. Dietrich, W. Ehrfeld, Manfred Lacher · Microelectronic Engineering · 1996
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引用本文 34
Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications
被引 100Wedyan Babatain, Sumana Bhattacharjee, Aftab Mustansir Hussain · ACS Applied Electronic Materials · 2021
Applications, materials, and fabrication of micro glass parts and devices: An overview
被引 77Hazem Hamed, Marwan Eldiasty, Seyed-Mahmoud Seyedi-Sahebari · Materials Today · 2023
The Liquid Metal Age: A Transition From Hg to Ga
被引 65Stephan Handschuh‐Wang, Tao Wang, Tomasz Gancarz · Advanced Materials · 2024
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