研究论文
A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure
Tingzhong Xu, Libo Zhao, Zhuangde Jiang, Xin Guo, Jianjun Ding, Wei Xiang, Yulong Zhao
Collaborative Innovation Center of Suzhou Nano Science and Technology Xi'an Jiaotong University
来源Sensors and Actuators A Physical
年份2016
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逐年被引趋势
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73
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2.90
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同类平均 = 1
同类平均 = 1
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学术脉络
学科主题
工程Advanced MEMS and NEMS Technologies
Sensor Technology and Measurement Systems · Advanced Sensor and Energy Harvesting Materials
参考文献 36
Foundations of MEMS
被引 307Chang Liu · 2006
Fiber loop ring-down optical fiber grating gas pressure sensor
被引 26Daqing Tang, Dexing Yang, Yajun Jiang · Optics and Lasers in Engineering · 2010
Fabrication of a CMOS compatible pressure sensor for harsh environments
被引 76Lukasz S. Pakula, Heng Yang, H.T.M. Pham · Journal of Micromechanics and Microengineering · 2004
此处列出前 3 条
引用本文 73
Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
被引 218Xiangguang Han, Mimi Huang, Zutang Wu · Microsystems & Nanoengineering · 2023
Recent trends in mechanical micropumps and their applications: A review
被引 190S Mohith, P. Navin Karanth, S. M. Kulkarni · Mechatronics · 2019
The Development of a New Piezoresistive Pressure Sensor for Low Pressures
被引 184Anh Vang Tran, Xianmin Zhang, Benliang Zhu · IEEE Transactions on Industrial Electronics · 2018
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