研究论文

Use of optical emission spectroscopy to predict silicon nitride layer properties

Lazhar Rachdi, Marc Hofmann

Fraunhofer Institute for Solar Energy Systems

来源Vacuum

年份2021

DOI10.1016/j.vacuum.2021.110322

原文https://doi.org/10.1016/j.vacuum.2021.110322

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逐年被引趋势

320

322

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0.65

领域内被引倍数
同类平均 = 1

前 35%

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同领域 · 同年份 · 同类型

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Google Scholar 与 OpenAlex 的被引统计范围不同，数值存在差异属正常。

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学术脉络

学科主题

工程

Semiconductor materials and devices

Thin-Film Transistor Technologies · Integrated Circuits and Semiconductor Failure Analysis

参考文献 41

Efficient passivation of solar cells by silicon nitride

A. El Amrani, A. Bekhtari, A. El Kechai · Vacuum · 2015

被引 15

Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

Helmut Mäckel, R. Lüdemann · Journal of Applied Physics · 2002

被引 253

Mechanism of SiN x H y Deposition from NH 3 ‐ SiH4 Plasma

Donald L. Smith, Andrew S. Alimonda, Chau‐Chen Chen · Journal of The Electrochemical Society · 1990

被引 246

此处列出前 3 条

引用本文 12

Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films

Li-Chun Chang, Ming-Ching Sung, Yung-I Chen · Vacuum · 2021

被引 27

Machine learning for advanced characterisation of silicon photovoltaics: A comprehensive review of techniques and applications

Yoann Buratti, Gaia Maria N. Javier, Zubair Abdullah‐Vetter · Renewable and Sustainable Energy Reviews · 2024

被引 25

Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission

Davi Fébba, Kevin R. Talley, K.E. Johnson · APL Materials · 2023

被引 25

按被引量排序，此处列出前 3 条

研究论文

Use of optical emission spectroscopy to predict silicon nitride layer properties

Lazhar Rachdi, Marc Hofmann

Fraunhofer Institute for Solar Energy Systems

来源Vacuum

年份2021

DOI10.1016/j.vacuum.2021.110322

原文https://doi.org/10.1016/j.vacuum.2021.110322

阅读操作

确认中

在文库中上传 PDF 后可生成中文音频讲解。

摘要与影响

摘要 · 节选

暂未获取摘要。可打开原文或 PDF，后续可基于全文生成更完整的速读。

逐年被引趋势

320

322

关键指标

被引次数 · OpenAlex

0.65

领域内被引倍数
同类平均 = 1

前 35%

引用位次
同领域 · 同年份 · 同类型

参考文献

Google Scholar 与 OpenAlex 的被引统计范围不同，数值存在差异属正常。

AI 辅助阅读

依据：文献信息

论文问答

当前基于文献信息回答

可就本文提问；依据不足时会说明。

学术脉络

学科主题

工程

Semiconductor materials and devices

Thin-Film Transistor Technologies · Integrated Circuits and Semiconductor Failure Analysis

参考文献 41

Efficient passivation of solar cells by silicon nitride

A. El Amrani, A. Bekhtari, A. El Kechai · Vacuum · 2015

被引 15

Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

Helmut Mäckel, R. Lüdemann · Journal of Applied Physics · 2002

被引 253

Mechanism of SiN x H y Deposition from NH 3 ‐ SiH4 Plasma

Donald L. Smith, Andrew S. Alimonda, Chau‐Chen Chen · Journal of The Electrochemical Society · 1990

被引 246

此处列出前 3 条

引用本文 12

Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films

Li-Chun Chang, Ming-Ching Sung, Yung-I Chen · Vacuum · 2021

被引 27

Machine learning for advanced characterisation of silicon photovoltaics: A comprehensive review of techniques and applications

Yoann Buratti, Gaia Maria N. Javier, Zubair Abdullah‐Vetter · Renewable and Sustainable Energy Reviews · 2024

被引 25

Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission

Davi Fébba, Kevin R. Talley, K.E. Johnson · APL Materials · 2023

被引 25

按被引量排序，此处列出前 3 条