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Fabrication and characterization of TiO2 and SiO2 as protective coating for Mo/Si multilayer by ion beam sputtering
Dianxiang Yao, Zhe Zhang, Zhe Zhang, Xinyi Liu, Qiushi Huang, Xiangyue Liu, Siyi Huang, Runze Qi 等 14 位
Tongji University Chinese Academy of Sciences Institute of High Energy Physics Southern University of Science and Technology
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逐年被引趋势
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学术脉络
学科主题
材料 / 化学Optical Coatings and Gratings
Advancements in Photolithography Techniques · Advanced X-ray Imaging Techniques
参考文献 45
Microstructures of Mo/Si multilayer mirror after proton irradiation
被引 4Qingfeng Guan, Peng Lu, Xiaodong Wang · Acta Physica Sinica · 2012
High-rate sputter deposition of SiO2 and TiO2 films for optical applications
被引 18S. S. Nandra · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990
Stress in Y2O3 thin films deposited by radio-frequency magnetron and ion beam sputtering
被引 14Randal W. Tustison, T. E. Varitimos, D. G. Montanari · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989
此处列出前 3 条
引用本文 6
Polaronic and Electrochemical Signatures in Group IVB (Ti, Zr, Hf) Oxides: Unified SKP–DFT Insights for Tunable Transport in Energy and Electronic Devices
被引 5Beatriz Moura Gomes, Júlia Holtz, Maria Luís Pinto · Advanced Functional Materials · 2025
Effect of microstructure optimization: Analysis of corrosion behavior of (ZrNbCrAlFe)1-xLax coating in high-pressure lithium borate solution
被引 2Changhao Liu, Xiufang Cui, Guo Dong Jin · Journal of Alloys and Compounds · 2025
TiO 2 protective capping for EUV mirrors: superior hydrogen plasma resistance and Sn contaminants removal
被引 1Sishu Wang, Zongbiao Ye, Andong Wu · Nanoscale · 2026
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