Surface Chemical Analysis with a Combined ESCA/Auger Apparatus

There are several unique advantages in combining x-ray photoelectron spectroscopy (ESCA) and Auger electron spectroscopy (AES) into a single instrument. The occurrence of surface segregation can often be detected without sputtering by measuring the magnitude of photoelectron and/or Auger peaks at two substantially different kinetic energies. ESCA contributes in-depth chemical bonding information which can be corrected with composition profiles obtained by AES.