Research on the mathematical model and design of a three loop controller for the oscillating scanning system of a laser line scanning galvanometer

The scanning vibration mirror system drives the scanning mirror fixed to it through the oscillation of the motor shaft, so as to control the reflected light to form a dynamic variable light path. The vibration mirror scanning system has higher controllability than the fixed optical path system and has been widely used.In this dissertation, after establishing the models of the core components of the scanning vibration mirror system, the mathematical model of the whole system is established.On this basis, simulation and theoretical analysis show that the system has some shortcomings, such as small bandwidth, low dynamic tracking accuracy, and the comprehensive dynamic performance of the system is easily affected by the input of external interference branches. A series correction controller and three closed-loop controller are designed for the above problems, respectively, and the control effects of the two controllers on the scanning vibration mirror system are studied through simulation experiments. By comparing the output response results of the system under the action of sinusoidal signals of different frequencies, it can be seen that the comprehensive effect of the three closed-loop controllers is better. Under the action of step signals, the overshoot of the three closed-loop correction controller correction system is 21.5% higher than that of the series controller correction system, the adjustment time is 82.7% less, and the steady-state error is significantly smaller. Therefore, it indicates that the three closed-loop correction system has good rapidity and steady-state accuracy.