研究论文开放获取
A scalable zinc-based coordination network for energy-efficient NF 3 /CF 4 separation with unprecedented selectivity
Yitao Li, Weilin Li, Liping Zhang, Na Geng, Li Xu, Shaomin Wang, Tingyu Zhu, Qingqing Guan 等 11 位
Xi'an Jiaotong University University of Science and Technology of China Chinese Academy of Sciences Institute of Process Engineering
阅读操作
确认中在文库中上传 PDF 后可生成中文音频讲解。
摘要与影响
摘要 · 完整
(4.8 Å). This advance enables cost-effective gas purification at $12.3 per kilogram, providing a practical solution for sustainable semiconductor manufacturing.
逐年被引趋势
950
25
926
关键指标
10
被引次数 · OpenAlex
2.22
领域内被引倍数
同类平均 = 1
同类平均 = 1
前 12%
引用位次
同领域 · 同年份 · 同类型
同领域 · 同年份 · 同类型
31
参考文献
Google Scholar 与 OpenAlex 的被引统计范围不同，数值存在差异属正常。
AI 辅助阅读
依据：摘要
论文问答
当前基于摘要回答
可就本文提问；依据不足时会说明。
学术脉络
学科主题
化学Metal-Organic Frameworks: Synthesis and Applications
Membrane Separation and Gas Transport · Covalent Organic Framework Applications
参考文献 31
Assessment of removal efficiency of perfluorocompounds (PFCs) in a semiconductor fabrication plant by gas chromatography
被引 44Chang-Feng Ou Yang, Seak-Hong Kam, Chia-Hung Liu · Chemosphere · 2009
Surface Wave Plasma Abatement of CHF3 and CF4 Containing Semiconductor Process Emissions
被引 80Bill A. Wofford, Marc W. Jackson, Christopher L. Hartz · Environmental Science & Technology · 1999
FTIR spectroscopy for the analysis of selected exhaust gas flows in silicon technology
被引 14Andreas Erwin Guber, Uwe Köhler · Journal of Molecular Structure · 1995
此处列出前 3 条
引用本文 10
DMF‐Mediated Diffusion Regulation in Pyridine–Carboxylate Metal–Organic Frameworks Enables Efficient CHF 3 Capture
被引 3Li‐Ping Zhang, Guo‐Wei Guan, Yu Chen · Angewandte Chemie International Edition · 2026
Overcoming coordination limits by monocarboxylate L-cysteine ligand: Hierarchical MIL-101(Cr) for efficient PFCs capture
被引 3Ning Jiang, Wei Xu, Yi Long Tang · Chemical Engineering Journal · 2025
Recent advances in designed metal-organic frameworks for greenhouse gas adsorption and separation
被引 0Jiao Yin, Nianqiao Qin, Qian Wang · Separation and Purification Technology · 2026
按被引量排序，此处列出前 3 条