Simulation of femtosecond laser-induced periodic surface structures on fused silica by considering intrapulse and interpulse feedback

The formation of laser-induced periodic surface structures (LIPSSs) on fused silica upon irradiation with plane wave, double pulse, spot processing, and scanning processing (pulse duration tp = 35 fs, center wavelength λ = 800 nm, low repetition rate ≈1 kHz) is studied theoretically with an improved three-dimensional finite-difference time-domain plasma model. The model covers both intrapulse feedback under single shot and interpulse feedback under multi-shots, thus enabling better prediction of transient responses during laser–material interaction and the evolution of the ablated morphology and accumulated defects’ density with more shots. In simulations of a single plane wave, a double pulse can modulate LIPSS periodicity. In simulations of spot processing with Gaussian beam, an increase in the number of shots results in a noticeable ablation pattern where high-spatial-frequency LIPSS surrounds low-spatial-frequency LIPSS at a fluence of 2.8 J/cm2. Moreover, simulations of scanning processing with Gaussian beam showcase the broad applicability of this model, revealing that the orientation of the LIPSS depends on the polarization direction rather than the scanning path. This new model provides a powerful tool to simulate the formation of LIPSS on silica, particularly when temporally modulated laser is involved or predicting the evolution of morphology dependent on the number of shots.