Plasma parameters measurements by means of Langmuir probe

The Langmuir probe (LP) diagnostics is a powerful method for the evaluation of the plasma resistivity curve (I-V curve) and the characterization of the following plasma parameters: electron temperature, electron density, ion density, and plasma potential. In presence of a stable plasma it is possible to extrapolate the electron energy distribution function of the plasma electron population. Because of the long acquisition time (in the order of hundreds of msec or more), this method is suitable for cw plasmas in thermal equilibrium for which the physical properties vary in a time scale longer than the acquisition time. At INFN-LNS the LP diagnostics has been used in order to characterize the TRasco Intense Proton Source plasma, and the low temperature – high density plasmas of a plasma reactor designed for complex molecules dissociation. In the first case, it has been possible to evaluate the plasma properties for different magnetic field profiles and for several operating conditions. In the second case, the LP has permitted to characterize the plasma properties of the plasma reactor at different microwave powers and gas pressures, with the aim to find the optimal experimental conditions in terms of rate of molecules dissociation and of plasma stability and reliability. These series of measurements are here reported, together with measurements of the plasma reactor parameters. Finally, some considerations about the possibility to extend the LP diagnostics to the non-equilibrium plasmas in pulsed mode, as the plasmas obtained by means of laser ablation of solid targets, are given; the design of a possible experimental set-up is outlined.