2D WSe2 films synthesized by thermally assisted conversion method
Irnik Dionisiev, Nikolay Minev, Dimitre Z. Dimitrov, Vladimira S. Videva, Krastyo Buchkov, Hristosko Dikov, P. M. Rafailov, Vera Marinova
Bulgarian Academy of Sciences Institute of Optical Materials and Technologies Jordan Malinowski Georgi Nadjakov Institute of Solid State Physics Sofia University "St. Kliment Ohridski"
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In this paper we report on the synthesis details of WSe2 nanolayers by thermally assisted selenization method of pre-deposited tungsten films in Chemical Vapour Deposition (CVD) reactor. Optical microscopy reveals WSe2 domains uniformly distributed with predominantly triangular shapes. Raman spectroscopy as well as UV-VIS-NIR spectrophotometry and sheet resistance measurements are used for characterization of the obtained 2D WSe2.
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