Development of a Navigation-Grade MEMS IMU

Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for a variety of applications. Design of the gyroscope is derived from that of the gyroscope in Honeywell's HG1930 tactical-grade MEMS IMU, a widely used tactical-grade MEMS IMU product. Fabrication processes similar to that of the gyroscope are used to fabricate a new vibrating beam accelerometer which measures acceleration via differential frequency change. Turn-on to turn-on bias repeatability better than 0.1 deg/hr for the gyroscopes and better than 20 micro-g for the accelerometers has been consistently demonstrated. Typical gyro ARW of 0.0035 deg/rt(hr) has been achieved, and accel root Allan variance is less than 10 micro-g at integration time of 1 second. The IMU has the same mechanical footprint (though slightly taller) and same electrical interface as Honeywell's HG1930 IMU.