Optimizing De-Trap Pulses in Gate-Injection Type Ferroelectric NAND Cells to Minimize Read After Write Delay Issue
Giuk Kim, Hyojun Choi, Hongrae Joh, Sangho Lee, Hunbeom Shin, HyunJun Kang, Hoon Kim, Seokjoong Shin 等 17 位
Korea Advanced Institute of Science and Technology Ajou University Hanyang University
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The ferroelectric (FE) NAND flash, featuring metal-interlayer-FE-interlayer-silicon (MIFIS) gate stacks, leverages both charge trapping and polarization (P) switching to achieve a broad memory window (MW) and low operation voltage. These remarkable advancements establish it as a viable contender for future NAND flash technologies. However, the read-after-write-delay (RAWD) problem during program/erase (PGM/ERS), caused by channel-injected interface trapped charges (${Q}_{\text {it}}$) between the FE layer and the channel interlayer (Ch.IL), leading to short-term Vth variations, remains unexplored in MIFIS FE-NAND cells. This letter presents the first analysis of RAWD in FE-NAND cells, including the experimental optimization of a de-trap pulse that effectively eliminates${Q}_{\text {it}}$whereas preserving both gate-injected interface trapped charges (${Q}_{\text {it}}$’) and P. Consequently, the FE-NAND cell exhibits a narrow MW of 3.45 V at a delay time (${t}_{\text {Delay}}\text {)}$of$1~\mu $s between PGM/ERS and read operations, expending to 7.40 V at a tDelay of 1 s. This variation is attributed to the generation of${Q}_{\text {it}}$and the subsequent de-trap process, affecting channel conductivity. To thoroughly address the RAWD, various pulse widths and amplitudes are experimentally explored immediately post-PGM/ERS to optimize the de-trap pulse for selective${Q}_{\text {it}}$removal. Upon applying the optimized de-trap pulse, the stable wide MW (7.40 V) is consistently maintained regardless of${t}_{\text {Delay}}$. This work is meaningful as it brings attention to previously unexplored issues in next-generation ferroelectric (FE) NAND cells and suggests practical operational solutions.
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工程Ferroelectric and Negative Capacitance Devices
Semiconductor materials and devices · Ferroelectric and Piezoelectric Materials
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