A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display

A new type of MEMS optical scanner for image projection display has been developed by using the ADRIP (arc discharge reactive ion plating) technique of PZT piezoelectric material on an SOI wafer. Stable and wide range 2D scan was made possible by combining resonant motion for the fast horizontal axis (11.2 kHz, optical 39 degrees) and quasi-static operation for the slow vertical axis (DC ~60 Hz, optical 29 degrees) operated at 40 Vpp voltage