研究论文
Vertical in-line rotary magnetron sputtering system for large area AZO coatings
Varun P. Joshi, M. G. Sreenivasan, Rajive M. Tomy, K. Mohanachandran
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Aluminum doped Zinc Oxide (AZO) is finding applications in various aspects of sensing, and in displays and solar cells. The paper describes the features of a vertical in-line rotary magnetron based sputtering system that has been developed for deposition of AZO coatings on large area glass substrates.
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学科主题
材料 / 化学ZnO doping and properties
Gas Sensing Nanomaterials and Sensors · Acoustic Wave Resonator Technologies
参考文献 12
Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator
被引 8Aliza Aini Md Ralib, Anis Nurashikin Nordin · Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS · 2013
Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters
被引 45Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh · Microsystem Technologies · 2012
Material study on reactively sputtered zinc oxide for thin film silicon solar cells
被引 103J. Hüpkes, B. Rech, Sonya Calnan · Thin Solid Films · 2005
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