Application of Embedded Stress Sensors for Third-Generation Reliability of Electronic Systems: Validation and Calibration of Mechanical Models in Fan-Out Wafer-Level Packaging
Yuexing Wang, Linwei Cao, Xu He, Kun Liu, Shuairong Deng, Quanfeng Zhou, Xiangyu Sun, Yao Yao
China Academy of Engineering Physics Nanjing University of Science and Technology Xi'an University of Architecture and Technology
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This article pioneers in-situ monitoring of stress evolution in operational advanced packaging structures through embedded silicon-based piezoresistive sensors. During four-point bending fatigue tests, we discovered a counterintuitive phenomenon: instead of exhibiting cyclic variations, the substrate stress progressively accumulated with loading cycles, eventually reaching saturation. To decipher this anomalous behavior, we developed an enhanced unified creep-plasticity constitutive model that concurrently captures nonlinear deformation mechanisms in solder joints, including simultaneous isotropic/kinematic hardening and strain-rate sensitivity. The model, validated through iterative finite element method (FEM)-sensor data convergence, revealed strain hardening in SAC305 solder joints as the dominant driver of substrate stress accumulation, with <8% deviation from experimental measurements—significantly outperforming conventional Anand models. Microstructural evidence from SEM/EDS further linked Pb particle fragmentation to accumulated inelastic deformation, bridging macro-mechanical responses to microscopic evolution. This article establishes a paradigm for reliability-by-design in next-gen packaging by synergizing embedded sensing with physics-aware constitutive modeling, addressing the critical gap in traditional approaches relying on ex-situ characterization.
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工程Electronic Packaging and Soldering Technologies
3D IC and TSV technologies · Integrated Circuits and Semiconductor Failure Analysis
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