Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement

This study demonstrates the structural design and implementation of a single-axis MEMS vibratory rate gyroscope for the robustness improvement. As in Fig.1, features of this study are: (1) the employment of the fully-decoupled mechanism minimizes the mechanical cross-coupling between the drive-mode and the sense-mode; (2) the tuning fork structure combined with differential sensing architecture increases the resistance against external vibrations; (3) a compact structural design consists of the structurally forced (by rigid lever mechanism) anti-phase sense-mode and the linear-coupled anti-phase drive-mode. Preliminary results show a reduced coupling signal of near 500°/s, and the vibration resistances along different directions are also investigated. Moreover, the angular rate sensitivity is 17.7µV/°/s, which can be further improved using a mode-matched operation.