Research on Hybrid Isolation System for Micro-Nano-Fabrication Platform

In order to obtain better vibration suppression effect, this paper designs a semiactive/fully active hybrid isolator by using magnetorheological elastomer (MRE) and piezoelectric material. Combined with multimode control scheme, full frequency vibration suppression is achieved. Firstly, series type structure is determined for the hybrid isolator, and the structure of hybrid isolator is designed. Next, the dynamic model of hybrid isolator is derived, the dynamic characteristics measurement for MRE isolator and piezoelectric stack actuator (PSA) is established, and parameters such as voltage-displacement coefficient, stiffness and damping constant are identified from the experimental results, respectively. Meanwhile, the switch frequency is determined by experimental results of PSA and MRE isolator. Lastly, influence of the stiffness of MRE, control voltage of PSA, and intermediate mass on hybrid isolator system is analyzed by simulations, and the results show that the hybrid isolator proposed is effective.