Enhanced-spatial-resolution optical surface profiler based on focusing deflectometry

Deflectometric slope profiler is an essential technique for accessing the surface metrology of mirrors used in synchrotron radiation beamlines. To increase the upper spatial frequency bandwidth limits of deflectometric slope profiler, reducing the beam spot size on the mirrors is necessary. In this paper, we introduce a profiler system: the focusing long trace profiler (FLTP). It contains a newly developed optical head capable of raising upper spatial frequency bandwidth limits by using a focused beam instead of a collimated beam to scan the sample. This feature has been proven in a numerical simulation experiment, where a spatial resolution of up to around 0.05 mm was reached when the sample is set at focus plane. The system is implemented and characterized in several experiments; calibration of the focusing optical head shows that it can achieve a high angular accuracy of sub-50 nrad root-mean-square (rms) and defocusing of sample under test (SUT) has no effect on the measurement results; the measurement tests also demonstrate the system's advantage in highly curved mirror profile metrology.