Photopolymer-based coaxial holographic lens for spectral confocal displacement and morphology measurement
Hongpeng Liu, Baohua Wang, Rui Wang, Mingchang Wang, Dan Yu, Weibo Wang
Civil Aviation University of China Dalian University of Technology Tianjin University of Technology
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摘要与影响
A spectral confocal displacement and morphology measurement device with a photopolymer-based coaxial holographic lens as a high dispersion element is developed. The linear dependence of the axial spatial position on the peak wavelength of dispersion spectrum provides a high accuracy and large range for measuring displacement and morphology. In the linear dispersion region, accompanied with a 120 nm shift of peak wavelength, the measure position range exceeds 20 mm. The available experimental accuracy of displacement and morphology can reach 47.5 μm/0.5 nm using a commercial optical fiber spectrum with a resolution of 0.5 nm. Utilizing thin polymer-based holographic lens with high dispersion can effectively compact the device size. Simultaneously, it can provide a large axial dispersion for measuring the spatial position characterization compared with the traditional glass-based dispersion lens group. A holographic optical lens based on a photopolymer is expected to apply in high-precision surface morphology measurement of large-scale macroscopic objects. It will improve the measurement accuracy and accelerate the development of holographic optical elements.
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计算机 / AIOptical measurement and interference techniques
Digital Holography and Microscopy · Advanced optical system design
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