Coaxial transceiving LiDAR based on a silicon photonic optical phased array

A high performance optical phased array (OPA) combined with frequency-modulated continuous-wave (FMCW) technology is essential for coherent all-solid-state light detection and ranging (LiDAR). In this work, we propose and experimentally demonstrate a coaxial transceiver based on a single OPA for a LiDAR system, which releases the off-chip circulator and collimator. The proposed scheme is demonstrated on the commonly used silicon-on-insulator (SOI) platform. For realizing the long optical grating antenna with only one-step etching, the bound state in the continuum is harnessed to simplify the fabrication process and ease the fabrication precision. Experimental results indicate that the OPA is with 0.076° vertical beam divergence under a 1.5 mm-long grating antenna. The measured field of view (FOV) is 40° × 8° without grating lobes under a wavelength band of 60 nm. The coaxial transceiver of the single OPA is also demonstrated with the FMCW method for ranging measurement at different angles.