Electromechanically tunable metasurface transmission waveplate at terahertz frequencies

Dynamic polarization control of light is essential for numerous applications ranging from enhanced imaging to materials characterization and identification. We present a reconfigurable terahertz metasurface quarter-waveplate consisting of electromechanically actuated micro-cantilever arrays. Our anisotropic metasurface enables tunable polarization conversion cantilever actuation. Specifically, voltage-based actuation provides mode selective control of the resonance frequency, enabling real-time tuning of the polarization state of the transmitted light. The polarization tunable metasurface has been fabricated using surface micromachining and characterized using terahertz time domain spectroscopy. We observe a ~230 GHz cantilever actuated frequency shift of the resonance mode, sufficient to modulate the transmitted wave from pure circular polarization to linear polarization. Our CMOS-compatible tunable quarter-waveplate enriches the library of terahertz optical components, thereby facilitating practical applications of terahertz technologies.