Kinetic electronics: Monolithic processing of a layered flexible robotic actuator film for simple film microrobot fabrication

Low-invasive soft robotic techniques can potentially be used for developing next-generation body–machine interfaces. Most soft robots require complicated fabrication processes involving 3D printing and bonding/assembling. In this letter, we describe a monolithic soft microrobot fabrication process for the mass production of soft film robots with a complex structure by simple 2D processing of a robotic actuator film. The 45 μg/mm^2 lightweight film robot can be driven at a voltage of CMOS compatible 5 V with 0.15 mm^-1 large curvature changes; it can generate a force 5.7 times greater than its self-weight. In a durability test, actuation could be carried out over 8000 times without degradation. To further demonstrate this technique, three types of film robots with multiple degrees of freedom and moving illuminator robot were fabricated. This technique can easily integrate various electrical circuits developed in the past to robotic systems and can be used for developing advanced wearable sensing devices; It can be called “Kinetic electronics.”