Thermodynamic Calculation of Phase Equilibria in As-Fe-In Ternary System Based on CALPHAD Approach

Thermodynamic calculation of phase equilibria in As-Fe-In ternary system is performed based on Calphad approach, directing a special attention to fabrication process of Fe/InAs hybrid structure for spin injection device. For this, the thermodynamic assessment of Fe-In binary system is first carried out utilizing reported experimental data. Then, the liquidus surface of the ternary system and invariant reactions are calculated. The isothermal sections in low temperature region are presented and discussed in the light of the optimization of the growth temperature of Fe film on InAs substrate during the fabrication process.