Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom
John T. Fourkas, Jinwei Gao, Zheng Han, Haitao Liu, Benedetta Marmiroli, Michael J. Naughton, John S. Petersen, Yong Gen Sun 等 10 位
University of Maryland, College Park South China Normal University Shanxi University State Key Laboratory of Quantum Optics and Quantum Optics Devices
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摘要与影响
We first consider nanofabrication on the laboratory scale, which we will define operationally as involving the patterning of areas of 1 mm 2 or more.Low-volume nanofabrication on this scale is crucial for a wide range of experimental platforms, as well as for prototyping and testing devices and technologies.
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工程Nanofabrication and Lithography Techniques
Advancements in Photolithography Techniques · Nanotechnology research and applications
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