Enhancement of a Single-Axis Femtosecond Laser Scanning System by Using Two Galvanometers to Improve the Telecentricity and the Effective Scanning Length on Laser Process

The galvanometer scanning system plays a crucial role in modern laser material processing. With the development of this industry, the requirements for galvanometer scanners are getting higher and higher, especially to overcome the inherent disadvantages that still exist, such as image distortion, marking speed and accuracy in state-of-the-art scanning systems. In this paper, a single-axis optical scanner using two galvanometers in combination with one f-theta telecentric lens and a 343 nm femtosecond pulse laser source is proposed as a new approach for enhancing the precision of laser micromachining technology. The additional second galvanometer is used to manipulate the output laser beam of the first galvanometer to the path with less lens aberration to enhance the telecentricity correction and the effective scanning area. This is based on the international standard regulation ISO (the International Organization for Standardization) 11145:2018 requirements in optics and photonics, in which an important criterion is for the roundness of the focused beam spot to be greater than 87% to determine the effective working length of the proposed scanning system compared to the conventional scanning system. It is demonstrated by optical simulations and real optical experiments that the effective working length can be increased by 3.6 mm, corresponding to 8.1% of the effective scanning field, to achieve a laser material processing system with ISO standard. The damped least squares (DLS) algorithm in optical design software ZEMAX is used to optimize the deflected angle of the two galvanometers to obtain the optimal incident position of the f-theta lens.