Accurate and Efficient Process Modeling and Inverse Optimization for Trench Metal Oxide Semiconductor Field Effect Transistors: A Machine Learning Proxy Approach

This study proposes a novel framework integrating long short-term memory (LSTM) networks with Bayesian optimization (BO) to address process–device co-optimization challenges in trench-gate metal–oxide–semiconductor field-effect transistor (MOSFET) manufacturing. Conventional TCAD simulations, while accurate, suffer from computational inefficiency in high-dimensional parameter spaces. To overcome this, an LSTM-based TCAD proxy model is developed, leveraging hierarchical temporal dependencies to predict electrical parameters (e.g., breakdown voltage, threshold voltage) with deviations below 3.5% compared to physical simulations. The model, validated on both N-type and P-type 20 V trench MOS devices, outperforms conventional RNN and GRU architectures, reducing average relative errors by 1.78% through its gated memory mechanism. A BO-driven inverse optimization methodology is further introduced to navigate trade-offs between conflicting objectives (e.g., minimizing on-resistance while maximizing breakdown voltage), achieving recipe predictions with a maximum deviation of 8.3% from experimental data. Validation via TCAD-simulated extrapolation tests and SEM metrology confirms the framework’s robustness under extended operating ranges (e.g., 0–40 V drain voltage) and dimensional tolerances within industrial specifications. The proposed approach establishes a scalable, data-driven paradigm for semiconductor manufacturing, effectively bridging TCAD simulations with production realities while minimizing empirical trial-and-error iterations.