Dynamic Multi-Axis Calibration of MEMS Accelerometers for Sensitivity and Linearity Assessment

A set of commercial triaxial micro-electromechanical systems (MEMS) accelerometers was calibrated using a custom-designed test bench featuring a rotating table. The calibration setup enabled simultaneous assessment of all accelerometer measurement components, generating precise reference accelerations within a frequency range of 0 to 8 Hz. A working model of the calibration setup and procedure was described to provide a complete uncertainty budget for both the reference and sensor accelerations. Through experimental uncertainty assessment of all the accelerometers, linearity and sensitivity were evaluated at different sensor levels. These parameters were determined by considering a single value for each accelerometer and detailing the analysis for each axis. Data processing revealed the achievable level of uncertainty and how it was influenced by the evaluation method employed for analyzing the calibration data.