Compact solid-state vertical-cavity-surface-emitting-laser beam scanning module with ultra-large field of view

A solid-state beam scanner is key element for next-generation 3D sensing. To overcome problems of current solid-state beam scanners, such as small field of view, limited resolutions and difficulties in large-scale manufacturing, we previously invented a solitary vertical-cavity surface-emitting laser (VCSEL) beam scanner based on a VCSEL waveguide/amplifier. In this paper, we proposed and demonstrated an electrical beam scanning module by integrating a tunable surface grating VCSEL to the solitary VCSEL scanner and by assisting with a diffractive optical element and prism mirror for an ultra-large field of view. We realized continuous fan beam scanning with a record field of view of >100° and obtained resolution points number of 1400. The module size could be managed within 10 mm × 6 mm × 1 mm.